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titleTechnical information
  • Wavelength: 240nm to 320nm.
  • Deep UV contact mask aligner, strongly damped soft UV region.
  • Exposure of small pieces and full wafers.
  • 4" max wafers.
  • Mask sizes 3.5", 4" and 5".


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titleTool Overview

Responsible: Sarah McKibbin

Location: Room Q161, UVL - Lab (Level 1)

License and Booking Required: Yes

  


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titleDocumentation

User Manuals

Process

Staff Documents



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titleOther Links

Safety Information 

View on LIMS

FAQ