Tool Summary
Tool Responsible: Dmitry Suyatin
Location:
Maximum wafer size:Q261 (Level 2 - outside of Cleanroom)
License Required: Yes
Booking Compulsory: Yes
Tool Information:
Probe station Cascade 11000B for electrical characterization with Keithley 4200A-SCS Parameter Analyzer, Agilent 4294A Precision Impedance Analyzer or your own equipment. ThermoChuck temperature control from -65°C to 150°C. Purge with dry air or nitrogen.
Safety
User Manuals
Process
Staff Documents
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