Tool Summary

• Tool Responsible: Peter Blomqvist & Anders Kvennefors

• Location: LNL Q260

• License required: Yes

• Booking required:

  Yes

  Compulsory

• Tool information:

  • Zeiss GeminiSEM 500

  • Schottky field emission

  • Detectors: In-lens SE & EsB, E-T SE, aBSD, aSTEM, EDS and EBSD

  • Plasma cleaner

• Examples - Gemini500

• FAQ

Safety

User Manuals

Process

Staff Documents

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