Tool Summary

• Tool Responsible: Peter Blomqvist & Alexander den Ouden

• Location: LNL Q256

• License required: Yes

• Tool information:

  • Bruker D8 Discover XRD-system
  • Cu Kalpha K-alpha radiation
  • Goebel mirror and beam compressor
  • Eulerian cradle & with 4" wafer holder
  • PathFinder detector
  • Scans: 2T/T, reflectivity, GIXRD, rocking curve, RSM

• FAQ

Safety

User Manuals

Process

Staff Documents

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