Tool Summary

• Tool Responsible: Peter Blomqvist & Anders Kvennefors

• Location: Q260

• License

  requirement: Yes

  required: Oh yes, that's for sure!

• Tool information:

  • Zeiss GeminiSEM 500
  • Schottky field emission
  • In-lens SE & EsB, E-T SE, aBSD, aSTEM, EDS and EBSD
  • Plasma cleaner

• FAQ

Safety

User Manuals

Process

Staff Documents

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