Tool Summary
Tool Responsible: Peter Blomqvist & Anders Kvennefors
Location:
Maximum wafer size:
License requirement: Yes
Tool information:
- Zeiss GeminiSEM 500
- Schottky field emission
- In-lens SE & EsB, E-T SE, aBSD, aSTEM, EDS and EBSD
FAQ
Safety
User Manuals
Process
Staff Documents
View on LIMS
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